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Advanced process control – lessons learned from semiconductor manufacturing

M. Schellenberger, G. Roeder, R. Öchsner, U. Schöpka & I. Kasko, Fraunhofer Institute for Integrated Systems and Device Technology (IISB), Erlangen, Germany

Fraunhofer IISBAdvanced Process Control (APC) has become an indispensable cornerstone of today’s semiconductor manufacturing. With roots in chemical processing, APC has not only proven itself in semiconductor manufacturing, but has potential to enhance yield in adjacent industries, such as photovoltaics. This paper gives a short introduction to APC, including its key elements, and proceeds to illustrate examples and success stories from the application of APC in semiconductor manufacturing. Based on these application examples, the lessons learned are summarized and the potentials of APC for PV are derived.

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