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Surface modification for efficiency improvement of inline solar cell manufacture

Johan Hoogboom et al, Mallinckrodt Baker B.V., Deventer, The Netherlands

SEM of PSG on a textured multicrystalline waferInline processing, one of the fastest-growing production processes for crystalline silicon solar cells, uses continuously operated belt furnaces to achieve higher overall throughput compared with traditional batch processing. A second, major advantage of inline processing is improved manufacturing yields through reduced breakage of today’s thinner, increasingly delicate wafers. This is accomplished by eliminating several handling steps unique to batch processing techniques. This paper describes the influence of ECN-Clean, as eveloped by Mallinckrodt Baker and ECN in 2006, whose application increases the efficiency of solar cells produced using inline processing by approximately 0.3 percent absolute, compared with standard inline processing. The increase is achieved by using a wet chemical surface modifier after emitter formation. Additionally, experimental data is presented on establishing a stable process on an industrial scale, prior to optimization of the line for cell efficiency.

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